RU / EN

Issue №2, 2000 г.

CONTENTS

The fourth All-Russia seminar "Problems of theoretical and applied electron optics"
The authors: Filachev A. M.
5
Electron and ion optics and electron- and ion-beam equipment in State research institute for electron and ion optics (It is 25 old)
The authors: Vasichev B. N., Filachev A. M.
7
Special feature complex equipment for electron-beam microlitografy
The authors: Vasichev B. N.
26
Device for between-operation controls of microphotoelectronics semi- conducter structures on capacity for work and rejection
The authors: Vasichev B. N., Disman S. A., Bocharov E. P., Savukov V. T.
47
Device for the in-process checks behind surface quality of substructures and thin films of microstructures of microelectronic wares in manufacturing process
The authors: Vasichev B. N., Chernova-Stoljarova E. E., Rosenfeld L. B.
58
Management information electron-beam wave fields in electron-beam calculators and electron microscope
The authors: Vasichev B. N.
67
The software development for computer modeling of electron guns with arbitrary-shaped cathode
The authors: Andreev S. V., Monastyrski M. A., Tarasov V. A., Murav'ev A. G.
77
New type of high-power switching electron tubes — electron-beam valves
The authors: Perevodchikov V. I., Shapenko V. N., Martynov V. F., Stalkov P. М., Shapiro A. L.
86
Space charge effects in the intense electron beams related to the electron cooling systems
The authors: Korotaev Yu. V., Meshkov I. N., Petrov A. L., Sidorin A. O., Smirnov A. V., Syresin E. M.
95
SPT as focusing plasma system with surface dominant discharge
The authors: Morozov A. I., Balebanov V. M., Bugrova A. I., Lipatov A. S., Khartchevnikov V. K.
106
Ionic atomizer with counter-arranged targets
The authors: Eremin A. P., Smolyaninov V. D., Filachev A. M.
118
Problems of election-optical systems for perspective beam-plasma microwave devices
The authors: Zavjalov M. A., Perevodchikov V. I., Syrovoy V. A.
122
Some specific features of MEMS technology and devices
The authors: Pyatishev E. N., Lurie M. S., Popova I. V., Kazakin A. N.
133
Election-optical system of multicharged ions, MIS-1
The authors: Abdulmanov V. G., Korotkova V. L., Maslennikov O. Yu., Nevski P. V., Rybachek V. P., Fedyaev V. K.
138
Electron radiant of multicharged ions, IMI-2
The authors: Abdulmanov V. G., Dementev E. N., Mginskya E. G., Mironenko L. A., Pirogov O. V., Tomi-lov V. P., Tzukanov V. M.
144
On space-time aberration and its possible applications in corpuscular optics
The authors: Matyshev A. A.
149
Isotrajectory dynamics as a new branch of corpuscular optics
The authors: Matyshev A. A.
155
On the isotrajectory lateral differential invariant
The authors: Matyshev A. A.
161
Experience of computer designing of election-optical system of the streak tube with magnetically focused of the image
The authors: Kulikov Yu. V., Pryasnishnikov I. G., Tarasov V. A.
165
Numerical simulation of the technological process of the deposition of thin films in gas- discharge electron beam evaporation
The authors: Melnik V. I., Melnik I. V., Porytsky P. V.
168
Investigation of high voltage glow discharge electrode's systems optic by using an image analyzing computer method
The authors: Melnik V. I., Melnik I. V.
173