The technological operation processes for fabrication of monolithic integrated IR detectors
The authors: Yakushev M. V., Vasiliev V. V., Dvoretsky S. A., Zahariyash T. I., Kozlov A. I., Sidorov Yu. G., Fomin B. I., Aseev A. L., Vinogradov A. V., Degtyarev E. V.
120