Examination of an inductive high-frequency discharge as the self-consistent system. Part III Examination of influence of a capacitive component on plasma parameters in an inductive high-frequency discharge of low pressure
The authors: Aleksandrov A. F., Bugrov G. E., Vavilin K. V., Kerimova I. F., Kralkina E. A., Pavlov V. B., Plaksin V. Yu., Rukhadze A. A., Savinov V. P.
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