V. M. Akymov, V. N. Vasilkov, I. L. Кasatkin, E. A. Klimanov, N. V. Kravtchenko, V. A. Morozov, A. A. Ryabova, V. F. Chyshko
The State Unitary Enterprise “RD& P Center “Orion”, Moscow, Russia
Design of miniature Focal Plane Array on spectral range 3-5 Mm is described. Two-dimension photodiode detector on InSb with thin base layer was used. Indium bumps for bonding silicon readout circuitry and photodetector on InSb were used.
