А.А. Zhukov, А.Е. Zdobnikov, S.N.Klemin, V.V. Tarasov, L.А. Filatov, Yu.S. Chetverov.
ISC CSRI “CYCLONE”, SUE SPE “PULSAR”, Moscow, Russia
The absorption of IR-radiation 200-4000 cm-1 range of 0,65-1,9 micron thick polyimide thin-films with such functional coverings as titanium, silicon nitride, aluminium was investigated. The 1,3-1,4 micron thick polyimide structure have 85 % absorption of IR-radiation of 720 - 1250 cm-1 range. On the base of the developed polyimide thin-film technology linear micro bolometric array detectors were fabricated and investigated. Calculated value of the linear micro bolometer array detectivity is 4 .107 cm.Hz1/2.W-1.
