R. S. Basyrov
A. N. Tupolev Kazan State Technical University, Kazan, Russia
N. F. Kashapov, G. S. Luchkin
Kazan State Technological University, Kazan, Russia
The model of a near-cathode area for the magnetron electric discharge is offered in view of processes of secondary a.f. emmission of electrons, ionization of atoms, and a field of a bulk charge of ions. The dependence of an ionization rate on energy of electrons and electric intensity is allowed. The dependence of a current density on the cathode from parameters of the discharge (a near-cathode voltage drop, an induction of a magnetic field etc.) is obtained. The obtained results can be utilised for optimization of the fall velocity of films.