A. A. Zhukov, Yu. S. Tchetverov
CYCLONE Central Research Institute, Moscow, Russia
I. Yu. Korovina
K. E. Ziolkovsky MATI, Moscow, Russia
G. A. Korneeva
TIPS RAS, Moscow, Russia
The structures and properties of the thin polyimide films and coatings used as “sacrificial” layers in the technology of non cooled nitride silicon microbolometers are studied by IR and two liquids wetting methods. It is shown that the nitride microbridge materials of the admissible quality can be prepared by plasma treating of polyimide coatings.
