Article: Rational technical embodying an optical method of detail mapping the oxygen in silicon plates on the basis of modern reachings of optoelectronics

Yu. R. Vinetsky, A. G. Titov, M. A. Trishenkov
FSUE “NPO “Orion”, Moscow, Russia

Based on the analysis of the problem of measuring the spatial distribution of oxygen in silicon, a structural diagram of the installation has been developed and substantiated. The search for an element base has confirmed the possibility of technical implementation of the method.